Parris desires power over the people in his community. He uses his position as the minister of Salem's church to control and manipulate them, especially when he accuses Abigail of witchcraft to save himself from trouble.
Parris is also greedy for wealth. He wants to get his hands on the property of John Proctor and Giles Corey, who are both wealthy landowners in Salem. He knows that he can accuse them of witchcraft and then take their land for himself.
Parris wants to be respected by his community. He knows that he is not a very popular minister and he is always trying to find ways to improve his standing. He also knows that if he accuses people of witchcraft, he will be seen as a hero.
Parris also wants to get revenge on John Proctor. He believes that Proctor is responsible for the death of his niece, Abigail Williams' parents. He is determined to see Proctor punished for his crime, even if it means accusing him of witchcraft.